Study on the Surface Morphology of Thermochromic Rf-Sputtered VO2 Films Using Temperature-Dependent Atomic Force Microscopy Emmanouil Gagaoudakis, Elisseos Verveniotis, Yuji Okawa, Giannis Michail, Elias Aperathitis, et al. Applied Sciences Switzerland, 2023 Vanadium dioxide (VO2) is a well-known phase-changing material that goes from a semiconducting state to a metallic one at a critical temperature of 68 °C, which is the closest to room temperature (25 °C). The electrical transition is also accompanied by structural and optical changes. The optical transition upon heating-also known as thermochromism-makes VO2 a possible coating for “intelligent” windows. In this work, the relationship between the thermochromic performance of VO2 films and the surface morphology was investigated using Temperature-dependent Atomic Force Microscopy (T-AFM) in conjunction with the X-ray Diffraction technique and Scanning Electron Microscopy. In particular, VO2 films were deposited using the rf sputtering technique on Silicon and glass substrates at a substrate temperature of 300 °C, which is one of the lowest for this technique to grow the thermochromic monoclinic phase of VO2. It was found that upon heating (25–100 °C), there was a decrease in RMS roughness for all films independent from the substrate; the value of RMS roughness, however, varied depending on the substrate. Finally, the thermochromic parameters of the VO2 films were correlated with the surface morphology and appeared to be dependent on the kind of substrate used.
Dry Resist Metrology Readiness for High-NA EUVL Gian Francesco Lorusso, Dieter Van Den Heuvel, Mohamed Zidan, Alain Moussa, Christophe Beral, et al. Proceedings of SPIE the International Society for Optical Engineering, 2023
Observation of room temperature electronic localization through a single graphene layer on sapphire Elisseos Verveniotis, Yuji Okawa, Shu Nakaharai, Shinichi Ogawa, Tomonobu Nakayama, et al. Japanese Journal of Applied Physics, 2019 A He + ion beam is used to induce electronic localization, on a single graphene layer exfoliated on an ultra-flat sapphire substrate, based on crystalline defects and with a lateral irradiation precision of 1 nm. Inducing a 1% carbon defect density by step by step irradiation of a 100-nm-wide band on the supported graphene increases its electrical resistance from 0.90 to 133 kΩ. The resistance build-up was monitored in situ and in real time by measuring the I ( t ) current intensity through the graphene monolayer flake during its irradiation. The whole process takes place on an ultra-polished sapphire surface used to retain the planarity of the graphene. We propose that local heating of the graphene by irradiation promotes the migration of the created atomic carbon defects to the edge of the flake. This inherently moderates the increase of resistance with time during He + irradiation due to the gradual re-opening of low-voltage graphene ballistic channels.
Self-sensitization and photo-polymerization of diacetylene molecules self-assembled on a hexagonal-boron nitride nanosheet Elisseos Verveniotis, Yuji Okawa, Kenji Watanabe, Takashi Taniguchi, Takaaki Taniguchi, et al. Polymers, 2018 Long poly-diacetylene chains are excellent candidates for planar, on-surface synthesized molecular electronic wires. Since hexagonal-Boron Nitride (h-BN) was identified as the best available atomically flat insulator for the deposition of poly-diacetylene precursors, we demonstrate the polymerization patterns and rate on it under UV-light irradiation, with subsequent polymer identification by atomic force microscopy. The results on h-BN indicate self-sensitization which yields blocks comprised of several polymers, unlike on the well-studied graphite/diacetylene system, where the polymers are always isolated. In addition, the photo-polymerization proceeds at least 170 times faster on h-BN, where it also results in longer polymers. Both effects are explained by the h-BN bandgap, which is larger than the diacetylene electronic excitation energy, thus allowing the transfer of excess energy absorbed by polymerized wires to adjacent monomers, triggering their polymerization. This work sets the stage for conductance measurements of single molecular poly-diacetylene wires on h-BN.
Self-assembling diacetylene molecules on atomically flat insulators Elisseos Verveniotis, Yuji Okawa, Marina V. Makarova, Yasuo Koide, Jiangwei Liu, et al. Physical Chemistry Chemical Physics, 2016 The diacetylene self-assembly mechanism on atomically flat insulators is elucidated, towards using polydiacetylene wires in molecular electronic devices.
Low temperature diamond growth Rsc Nanoscience and Nanotechnology, 2014
E-beam metrology and line local critical dimension uniformity of thin dry resist films for high numerical aperture extreme ultraviolet lithography M Zidan, GF Lorusso, D De Simone, A De Silva, A Haider, E Verveniotis, ... Journal of Micro/Nanopatterning, Materials, and Metrology 22 (4), 044001-044001 , 2023 2023 Citations: 2
Study on the Surface Morphology of Thermochromic Rf-Sputtered VO 2 Films Using Temperature-Dependent Atomic Force Microscopy E Gagaoudakis, E Verveniotis, Y Okawa, G Michail, E Aperathitis, ... Applied Sciences 13 (13), 7662 , 2023 2023 Citations: 3
Dry resist patterning readiness towards high-NA EUV lithography HS Suh, D De Simone, C Beral, M Gupta, N Vandenbroeck, A De Silva, ... Advances in Patterning Materials and Processes XL 12498, 1249803 , 2023 2023 Citations: 17
Dry resist metrology readiness for high-NA EUVL GF Lorusso, D Van Den Heuvel, M Zidan, A Moussa, C Beral, AL Charley, ... Metrology, Inspection, and Process Control XXXVII 12496, 290-299 , 2023 2023 Citations: 5
Achieving zero EUV patterning defect with dry photoresist system M Alvi, R Gottscho, A Haider, S Heo, PY Hsieh, CC Huang, G Jurczak, ... Advances in Patterning Materials and Processes XXXIX, PC120550B , 2022 2022 Citations: 11
Observation of room temperature electronic localization through a single graphene layer on sapphire E Verveniotis, Y Okawa, S Nakaharai, S Ogawa, T Nakayama, M Aono, ... Japanese Journal of Applied Physics 58 (5), 055007 , 2019 2019 Citations: 4
Self-sensitization and photo-polymerization of diacetylene molecules self-assembled on a hexagonal-boron nitride nanosheet E Verveniotis, Y Okawa, K Watanabe, T Taniguchi, T Taniguchi, M Osada, ... Polymers 10 (2), 206 , 2018 2018 Citations: 9
Ultrathin monomolecular films and robust assemblies based on cyclic catechols MM Zieger, O Pop-Georgievski, A de los Santos Pereira, E Verveniotis, ... Langmuir 33 (3), 670-679 , 2017 2017 Citations: 15
Quantum transport localization through graphene S Srivastava, H Kino, S Nakaharai, E Verveniotis, Y Okawa, S Ogawa, ... Nanotechnology 28 (3), 035703 , 2017 2017 Citations: 8
Self-assembled diacetylene molecular wire polymerization on an insulating hexagonal boron nitride (0001) surface MV Makarova, Y Okawa, E Verveniotis, K Watanabe, T Taniguchi, ... Nanotechnology 27 (39), 395303 , 2016 2016 Citations: 27
On-Surface Synthesis of Single Conjugated Polymer Chains for Single-Molecule Devices Y Okawa, SK Mandal, M Makarova, E Verveniotis, M Aono On-Surface Synthesis: Proceedings of the International Workshop On-Surface … , 2016 2016
Self-assembling diacetylene molecules on atomically flat insulators E Verveniotis, Y Okawa, MV Makarova, Y Koide, J Liu, B Šmíd, ... Physical Chemistry Chemical Physics 18 (46), 31600-31605 , 2016 2016 Citations: 12
Low temperature diamond growth T Izak, O Babchenko, S Potocky, Z Remes, H Kozak, E Verveniotis, ... 2014 Citations: 9
Controlling electrostatic charging of nanocrystalline diamond at nanoscale E Verveniotis, A Kromka, B Rezek Langmuir 29 (23), 7111-7117 , 2013 2013 Citations: 9
Structuring and study of electronic and chemical properties of semiconductor surfaces E Verveniotis Univerzita Karlova, Matematicko-fyzikální fakulta , 2013 2013
A facile avenue to conductive polymer brushes via cyclopentadiene–maleimide Diels–Alder ligation B Yameen, C Rodriguez-Emmenegger, CM Preuss, O Pop-Georgievski, ... Chemical Communications 49 (77), 8623-8625 , 2013 2013 Citations: 47
Generating ordered Si nanocrystals via atomic force microscopy E Verveniotis, E Šípek, J Stuchlík, J Kočka, B Rezek Journal of non-crystalline solids 358 (17), 2118-2121 , 2012 2012 Citations: 4
How nanocrystalline diamond films become charged in nanoscale E Verveniotis, A Kromka, M Ledinský, B Rezek Diamond and related materials 24, 39-43 , 2012 2012 Citations: 14
Comparative study on dry etching of polycrystalline diamond thin films T Izak, A Kromka, O Babchenko, M Ledinsky, K Hruska, E Verveniotis Vacuum 86 (6), 799-802 , 2012 2012 Citations: 39
Direct growth of sub-micron diamond structures O Babchenko, E Verveniotis, K Hruska, M Ledinsky, A Kromka, B Rezek Vacuum 86 (6), 693-695 , 2012 2012 Citations: 14
MOST CITED SCHOLAR PUBLICATIONS
A facile avenue to conductive polymer brushes via cyclopentadiene–maleimide Diels–Alder ligation B Yameen, C Rodriguez-Emmenegger, CM Preuss, O Pop-Georgievski, ... Chemical Communications 49 (77), 8623-8625 , 2013 2013 Citations: 47
Comparative study on dry etching of polycrystalline diamond thin films T Izak, A Kromka, O Babchenko, M Ledinsky, K Hruska, E Verveniotis Vacuum 86 (6), 799-802 , 2012 2012 Citations: 39
Self-assembled diacetylene molecular wire polymerization on an insulating hexagonal boron nitride (0001) surface MV Makarova, Y Okawa, E Verveniotis, K Watanabe, T Taniguchi, ... Nanotechnology 27 (39), 395303 , 2016 2016 Citations: 27
Guided assembly of nanoparticles on electrostatically charged nanocrystalline diamond thin films E Verveniotis, A Kromka, M Ledinský, J Čermák, B Rezek Nanoscale research letters 6 (1), 144 , 2011 2011 Citations: 21
Dry resist patterning readiness towards high-NA EUV lithography HS Suh, D De Simone, C Beral, M Gupta, N Vandenbroeck, A De Silva, ... Advances in Patterning Materials and Processes XL 12498, 1249803 , 2023 2023 Citations: 17
Ultrathin monomolecular films and robust assemblies based on cyclic catechols MM Zieger, O Pop-Georgievski, A de los Santos Pereira, E Verveniotis, ... Langmuir 33 (3), 670-679 , 2017 2017 Citations: 15
How nanocrystalline diamond films become charged in nanoscale E Verveniotis, A Kromka, M Ledinský, B Rezek Diamond and related materials 24, 39-43 , 2012 2012 Citations: 14
Direct growth of sub-micron diamond structures O Babchenko, E Verveniotis, K Hruska, M Ledinsky, A Kromka, B Rezek Vacuum 86 (6), 693-695 , 2012 2012 Citations: 14
Self-assembling diacetylene molecules on atomically flat insulators E Verveniotis, Y Okawa, MV Makarova, Y Koide, J Liu, B Šmíd, ... Physical Chemistry Chemical Physics 18 (46), 31600-31605 , 2016 2016 Citations: 12
Local electrostatic charging differences of sub‐100 nm nanocrystalline diamond films E Verveniotis, J Čermák, A Kromka, M Ledinský, Z Remeš, B Rezek physica status solidi (a) 207 (9), 2040-2044 , 2010 2010 Citations: 12
Achieving zero EUV patterning defect with dry photoresist system M Alvi, R Gottscho, A Haider, S Heo, PY Hsieh, CC Huang, G Jurczak, ... Advances in Patterning Materials and Processes XXXIX, PC120550B , 2022 2022 Citations: 11
AFM induced electrostatic charging of nanocrystalline diamond on silicon E Verveniotis, J Čermák, A Kromka, B Rezek physica status solidi (b) 246 (11‐12), 2798-2801 , 2009 2009 Citations: 11
Role of current profiles and atomic force microscope tips on local electric crystallization of amorphous silicon E Verveniotis, B Rezek, E Šípek, J Stuchlik, J Kočka Thin Solid Films 518 (21), 5965-5970 , 2010 2010 Citations: 10
Self-sensitization and photo-polymerization of diacetylene molecules self-assembled on a hexagonal-boron nitride nanosheet E Verveniotis, Y Okawa, K Watanabe, T Taniguchi, T Taniguchi, M Osada, ... Polymers 10 (2), 206 , 2018 2018 Citations: 9
Low temperature diamond growth T Izak, O Babchenko, S Potocky, Z Remes, H Kozak, E Verveniotis, ... 2014 Citations: 9
Controlling electrostatic charging of nanocrystalline diamond at nanoscale E Verveniotis, A Kromka, B Rezek Langmuir 29 (23), 7111-7117 , 2013 2013 Citations: 9
Quantum transport localization through graphene S Srivastava, H Kino, S Nakaharai, E Verveniotis, Y Okawa, S Ogawa, ... Nanotechnology 28 (3), 035703 , 2017 2017 Citations: 8
Impact of AFM-induced nano-pits in a-Si: H films on silicon crystal growth E Verveniotis, B Rezek, E Šípek, J Stuchlík, M Ledinský, J Kočka Nanoscale research letters 6 (1), 145 , 2011 2011 Citations: 6
Dry resist metrology readiness for high-NA EUVL GF Lorusso, D Van Den Heuvel, M Zidan, A Moussa, C Beral, AL Charley, ... Metrology, Inspection, and Process Control XXXVII 12496, 290-299 , 2023 2023 Citations: 5
Observation of room temperature electronic localization through a single graphene layer on sapphire E Verveniotis, Y Okawa, S Nakaharai, S Ogawa, T Nakayama, M Aono, ... Japanese Journal of Applied Physics 58 (5), 055007 , 2019 2019 Citations: 4
