@etu.ru
Saint Petersburg Electrotechnical University "LETI" Department of Photonics
Saint Petersburg Electrotechnical University "LETI"
Scopus Publications
I N Kashkul, L D Bakhchova, K G Elanskaia, and D N Redka
IOP Publishing
The composition and microstructure of nanoscale metal oxide coatings deposited by magnetron RF sputtering copper on the quartz glass with followed heat treatment were investigated. The dependence of the film thickness and the content of oxides CuO and Cu2O in it depending on the temperature and time of heat treatment conditions were obtained. Studies have shown that, depending on the mode of receipt of copper oxide films may be multiphasic and include various oxide phases, predominantly, CuO and Cu2O with different bandgap and p-type conductivity.
D N Redka, K G Elanskaia, and L D Bakhchova
IOP Publishing
The method of high-frequency magnetron sputtering allows to obtain thin films of zinc oxide with nanostructured surface morphology and, consequently, with unique optical characteristics. Such coating can provide an increase in the number of particles penetrating the photovoltaic structure and the length of their optical path. Vacuum-plasma processing of ZnO films allows to change the morphology of their surface, and annealing largely influences the optical transmission.