Study of nanoscale metal oxide coatings produced by magnetron sputtering of copper followed by heat treatment I N Kashkul, L D Bakhchova, K G Elanskaia, D N Redka Iop Conference Series Materials Science and Engineering, 2018 The composition and microstructure of nanoscale metal oxide coatings deposited by magnetron RF sputtering copper on the quartz glass with followed heat treatment were investigated. The dependence of the film thickness and the content of oxides CuO and Cu2O in it depending on the temperature and time of heat treatment conditions were obtained. Studies have shown that, depending on the mode of receipt of copper oxide films may be multiphasic and include various oxide phases, predominantly, CuO and Cu2O with different bandgap and p-type conductivity.
The properties of ZnO films obtained by high-frequency magnetron deposition with subsequent vacuum annealing and plasma treatment D N Redka, K G Elanskaia, L D Bakhchova Journal of Physics Conference Series, 2017 The method of high-frequency magnetron sputtering allows to obtain thin films of zinc oxide with nanostructured surface morphology and, consequently, with unique optical characteristics. Such coating can provide an increase in the number of particles penetrating the photovoltaic structure and the length of their optical path. Vacuum-plasma processing of ZnO films allows to change the morphology of their surface, and annealing largely influences the optical transmission.