Scopus Publications
- Low temperature sputtering deposition of Al1−xScxN thin films: Physical, chemical, and piezoelectric properties evolution by tuning the nitrogen flux in (Ar + N2) reactive atmosphere
M. A. Signore, A. Serra, D. Manno, G. Quarta, L. Calcagnile, L. Maruccio, E. Sciurti, E. Melissano, A. Campa, M. C. Martucci, L. Francioso, L. Velardi
Journal of Applied Physics, 2024
This work investigates the physical properties of Al1−xScxN thin films sputtered at low temperatures by varying the process conditions. Specifically, the films were deposited at room temperature by applying a radio frequency power equal to 150 W to an AlSc alloy (60:40) target, varying the nitrogen flux percentage in the (Ar + N2) sputtering atmosphere (30%, 40%, 50%, and 60%) and keeping constant the working pressure at 5 × 10−3 mbar. The structural and chemical properties of the Al1−xScxN films were studied by x-ray diffraction and Rutherford backscattering spectrometry techniques, respectively. The piezoelectric response was investigated by piezoresponse force microscopy. In addition, the surface potential was evaluated for the first time for Sc-doped AlN thin films by Kelvin probe force microscopy, providing piezoelectric coefficients free from the no-piezoelectric additional effect to the mechanical deformation, i.e., the electrostatic force. By alloying AlN with scandium, the piezoelectric response was strongly enhanced (up to 200% compared to undoped AlN), despite the low deposition temperature and the absence of any other additional energy source supplied to the adatoms during thin film growth, which generally promotes a better structural arrangement of polycrystalline film. This is a strategic result in the field of microelectromechanical systems completely fabricated at low temperatures. - Improvement of the piezoelectric response of AlN thin films through the evaluation of the contact surface potential by piezoresponse force microscopy
M.A. Signore, L. Francioso, C. De Pascali, A. Serra, D. Manno, G. Rescio, F. Quaranta, E. Melissano, L. Velardi
Vacuum, 2023 - Synthesis and characterization of UV-curable nanocellulose/ZnO/AlN acrylic flexible films: Thermal, dynamic mechanical and piezoelectric response
Maria Assunta Signore, Chiara De Pascali, Donatella Duraccio, Giulio Malucelli, Ambra Fioravanti, Enrico Melissano, Maria Concetta Martucci, Maurizio Masieri, Pietro Siciliano, Luca Francioso
Journal of Applied Polymer Science, 2021
Abstract This work is aimed at fabricating nanocomposites based on zinc oxide (ZnO) nanostructures and nanocellulose dispersed in a UV‐cured acrylic matrix (EC) for application as functional coatings for self‐powered applications. Morphological, thermal, and dynamic mechanical properties of the nanocomposites were characterized by X‐Ray diffractometry (XRD), scanning electron microscopy, and differential scanning calorimetry. The piezoelectric behavior was evaluated in terms of root mean square (RMS) open circuit voltage, at different accelerations applied to cantilever beams. The generated voltage was correlated with ZnO nanostructures morphology, aluminum nitride film integration on the beam and proof mass insertion at the tip. Nitride layer increased the RMS voltage from 1 to 2.4 mV up to 3.9 mV (using ZnO nanoflowers). As confirmed by XRD analyses, the incorporation of ZnO nanostructures into the acrylic matrix favored an ordered structural arrangement of the deposited AlN layer, hence improving the piezoelectric response of the resulting nanocomposites. With proof mass insertion, the output voltage was further increased, reaching 4.5 mV for the AlN‐coated system containing ZnO nanoflowers. - Long- and short-range ordered gold nanoholes as large-area optical transducers in sensing applications
Maura Cesaria, Adriano Colombelli, Daniela Lospinoso, Antonietta Taurino, Enrico Melissano, Roberto Rella, Maria Manera
Chemosensors, 2019
Unconventional lithography (such as nanosphere lithography (NSL) and colloidal lithography (CL)) is an attractive alternative to sequential and very expensive conventional lithography for the low-cost fabrication of large-area nano-optical devices. Among these, nanohole (NH) arrays are widely studied in nanoplasmonics as transducers for sensing applications. In this work, both NSL and CL are implemented to fabricate two-dimensional distributions of gold NHs. In the case of NSL, highly ordered arrays of gold NHs distributed in a hexagonal lattice onto glass substrates were fabricated by a simple and reproducible approach based on the self-assembling of close-packed 500 nm diameter polystyrene particles at an air/water interface. After the transfer onto a solid substrate, the colloidal masks were processed to reduce the colloidal size in a controllable way. In parallel, CL was implemented with short-range ordered gold NH arrays onto glass substrates that were fabricated by electrostatically-driven self-assembly of negatively charged colloids onto a polydiallyldimethylammonium (PDDA) monolayer. These distributions were optimized as a function of the colloidal adsorption time. For both approaches, controllable and reproducible procedures are presented and discussed. The optical responses of the NH structures are related to the short-range ordering level, and their good performances as refractive index transducers are demonstrated. - An integrated micro-fluxgate magnetic sensor with front-end circuitry
A. Baschirotto, E. Dallago, P. Malcovati, M. Marchesi, E. Melissano, M. Morelli, P. Siciliano, G. Venchi
IEEE Transactions on Instrumentation and Measurement, 2009
In this paper, a double-axis planar micro-fluxgate magnetic sensor and its front-end circuitry are presented. The ferromagnetic core material, i.e., the Vitrovac 6025 X, has been deposited on top of the coils with the dc-magnetron sputtering technique, which is a new type of procedure with respect to the existing solutions in the field of fluxgate sensors. This procedure allows us to obtain a core with the good magnetic properties of an amorphous ferromagnetic material, which is typical of a core with 25-mum thickness, but with a thickness of only 1 mum, which is typical of an electrodeposited core. The micro-Fluxgate has been realized in a 0.5- mum CMOS process using copper metal lines to realize the excitation coil and aluminum metal lines for the sensing coil, whereas the integrated interface circuitry for exciting and reading out the sensor has been realized in a 0.35-mum CMOS technology. Applying a triangular excitation current of 18 mA peak at 100 kHz, the magnetic sensitivity achieved is about 10 LSB/muT [using a 13-bit analog-to-digital converter (ADC)], which is suitable for detecting the Earth's magnetic field (plusmn60 muT), whereas the linearity error is 3% of the full scale. The maximum angle error of the sensor evaluating the Earth magnetic field is 2deg. The power consumption of the sensor is about 13.7 mW. The total power consumption of the system is about 90 mW. - Nanopatterning-enabled inductance behaviour and equivalent circuit properties of quasi 1-D array of titania nanowires
Smart Systems Integration 2009 Ssi 2009, 2009 - Precursors for the combustion synthesis of metal oxides from the sol-gel processing of metal complexes
Mauro Epifani, Enrico Melissano, Giovanni Pace, Monica Schioppa
Journal of the European Ceramic Society, 2007 - A CMOS 2D micro-fluxgate earth magnetic field sensor with digital output
Andrea Baschirotto, Enrico Dallago, Vincenzo Ferragina, Massimo Ferri, Marco Grassi, Piero Malcovati, Marco Marchesi, Enrico Melissano, Marco Morelli, Andrea Rossini, Stefano Ruzza, Pietro Siciliano, Giuseppe Venchi
Digest of Technical Papers IEEE International Solid State Circuits Conference, 2007
A complete CMOS integrated microsystem for detecting the direction of the Earth's magnetic field (whose full-scale value is on the order of 60muT), realized with the micromodule approach, including both sensor and electronic interface circuit, achieves 4deg accuracy on the measured angle and provides a digital output. The system response is linear in the range of plusmn60muT with a maximum non-linearity error of about 3% of full-scale. - Fluxgate magnetic sensor and front-end circuitry in an integrated microsystem
A. Baschirotto, F. Borghetti, E. Dallago, P. Malcovati, M. Marchesi, E. Melissano, P. Siciliano, G. Venchi
Sensors and Actuators A Physical, 2006 - An integrated micro-fluxgate magnetic sensor with sputtered ferromagnetic core
Andrea Baschirotto, Enrico Dallago, Piero Malcovati, Marco Marchesi, Enrico Melissano, Pietro Siciliano, Giuseppe Venchi
Conference Record IEEE Instrumentation and Measurement Technology Conference, 2006
In this paper a double axis planar micro-Fluxgate magnetic sensor is presented. The ferromagnetic core material, the Vitrovac 6025 X, has been deposited on top of the coils with the DC-magnetron sputtering technique, a new type of procedure with respect the existing solutions in the field of Fluxgate sensor. This procedure allows us to obtain a core with the good magnetic properties of the amorphous ferromagnetic material, typical of a core 25 mum thick, but with a thickness of only 1 mum, typical of a core electrodeposited. The micro-Fluxgate has been realized in a 0.5 mum CMOS process using copper metal lines to realize the excitation coil and aluminum metal lines for the sensing coils. Applying a triangular excitation current of 18 mA peak at 100 kHz the magnetic sensitivity achieved is about 0.45 mV/muT, suitable for detecting the Earth's magnetic field (plusmn50 muT), while the linearity error is 1.15% of the full scale. The maximum angle error of the sensor, evaluating the Earth magnetic field, is 3.4deg. The power consumption of the sensor is about 13.7 mW - Adhesion enhancement of optical coatings on plastic substrate via ion treatment
F. Sarto, M. Alvisi, E. Melissano, A. Rizzo, S. Scaglione, L. Vasanelli
Thin Solid Films, 1999 - Deposition of profiled optical coatings by masking techniques: A study in the framework of the linear system theory
E Nichelatti, A Tirabassi, E Melissano
Pure and Applied Optics Journal of the European Optical Society Part A, 1994
RECENT SCHOLAR PUBLICATIONS
- Low temperature sputtering deposition of Al1− xScxN thin films: Physical, chemical, and piezoelectric properties evolution by tuning the nitrogen flux in (Ar+ N2) reactive …
MA Signore, A Serra, D Manno, G Quarta, L Calcagnile, L Maruccio, ...
Journal of Applied Physics 135 (12) , 2024
2024
Citations: 11 - Improvement of the piezoelectric response of AlN thin films through the evaluation of the contact surface potential by piezoresponse force microscopy
MA Signore, L Francioso, C De Pascali, A Serra, D Manno, G Rescio, ...
Vacuum 218, 112596 , 2023
2023
Citations: 11 - Tunable Nanoplasmonic Transducers: Performance Analysis and Potential Application
A Colombelli, D Lospinoso, R Rella, MG Manera
Chemosensors 11 (2), 109 , 2023
2023
Citations: 5 - Investigation of the effects of pulse-atomic force nanolithography parameters on 2.5 d nanostructures’ morphology
P Pellegrino, I Farella, M Cascione, V De Matteis, AP Bramanti, ...
Nanomaterials 12 (24), 4421 , 2022
2022
Citations: 6 - A wearable and smart actuator for haptic stimulation
G Fersurella, A Della Torre, F Quaranta, P Losito, L D'Alessandro, S Invitto, ...
Micro and Nano Engineering 16, 100161 , 2022
2022
Citations: 7 - Flow regime characterization of a silicon-based vaporizing liquid microthruster
D Fontanarosa, L Francioso, MG De Giorgi, C De Pascali, A Ficarella, ...
Acta Astronautica 193, 691-703 , 2022
2022
Citations: 8 - Shape modulation of plasmonic nanostructures by unconventional lithographic technique
A Colombelli, D Lospinoso, R Rella, MG Manera
Nanomaterials 12 (3), 547 , 2022
2022
Citations: 10 - Self-assembled metal nanohole arrays with tunable plasmonic properties for SERS single-molecule detection
D Lospinoso, A Colombelli, M Lomascolo, R Rella, MG Manera
Nanomaterials 12 (3), 380 , 2022
2022
Citations: 20 - Monolayer colloidal lithography protocol: theoretical assessment and applicative potentialities for metal nanohole fabrication
M Cesaria, A Taurino, MG Manera, S Scarano, M Minunni, R Rella
Applied Surface Science Advances 5, 100097 , 2021
2021
Citations: 4 - Fabrication and embedded sensors characterization of a micromachined water-propellant vaporizing liquid microthruster
D Fontanarosa, C De Pascali, MG De Giorgi, P Siciliano, A Ficarella, ...
Applied Thermal Engineering 188, 116625 , 2021
2021
Citations: 18 - Synthesis and characterization of UV‐curable nanocellulose/ZnO/AlN acrylic flexible films: Thermal, dynamic mechanical and piezoelectric response
MA Signore, C De Pascali, D Duraccio, G Malucelli, A Fioravanti, ...
Journal of Applied Polymer Science 138 (4), 49731 , 2021
2021
Citations: 6 - Nanoplasmonic biosensing approach for endotoxin detection in pharmaceutical field
A Colombelli, E Primiceri, S Rizzato, AG Monteduro, G Maruccio, R Rella, ...
Chemosensors 9 (1), 10 , 2021
2021
Citations: 16 - Flow regime characterization of a mems-based vaporizing liquid microthruster
D Fontanarosa, L Francioso, MG De Giorgi, C De Pascali, A Ficarella, ...
AC 2020 PROCEEDINGS, 1-10 , 2020
2020
Citations: 1 - Short-range ordered 2D nanoholes: lattice-model and novel insight into the impact of coordination geometry and packing on their propagating-mode transmittance features
M Cesaria, A Taurino, MG Manera, R Rella
Nanoscale Advances 2 (9), 4133-4146 , 2020
2020
Citations: 4 - Preliminary evaluation of a MEMS-based water propellant Vaporizing Liquid Microthruster for small satellites
MG De Giorgi, D Fontanarosa, L Francioso, C De Pascali, A Ficarella
Italian Association of Aeronautics and Astronautics-XXV International … , 2019
2019 - Preliminary results concerning the development of a water-propellant vaporizing liquid microthruster for small satellites
MG De Giorgi, L Francioso, C De Pascali, A Ficarella, D Fontanarosa
8TH EUROPEAN CONFERENCE FOR AERONAUTICS AND SPACE SCIENCES (EUCASS) , 2019
2019
Citations: 1 - Long-and short-range ordered gold nanoholes as large-area optical transducers in sensing applications
M Cesaria, A Colombelli, D Lospinoso, A Taurino, E Melissano, R Rella, ...
Chemosensors 7 (1), 13 , 2019
2019
Citations: 12 - Gold nanoholes fabricated by colloidal lithography: Novel insights into nanofabrication, short-range correlation and optical properties
M Cesaria, A Taurino, MG Manera, M Minunni, S Scarano, R Rella
NANOSCALE 11, 8416-8432 , 2019
2019 - Gold nanoholes fabricated by colloidal lithography: novel insights into nanofabrication, short-range correlation and optical properties
M Cesaria, A Taurino, MG Manera, M Minunni, S Scarano, R Rella
Nanoscale 11 (17), 8416-8432 , 2019
2019
Citations: 22 - Fabrication of AlN-Based Flexible Piezoelectric Pressure Sensor to Integrate into an Artificial Pancreas
MA Signore, CD Pascali, G Rescio, A Taurino, P Dario, V Iacovacci, ...
Proceedings 2 (13), 1037 , 2018
2018
Citations: 2
MOST CITED SCHOLAR PUBLICATIONS
- Precursors for the combustion synthesis of metal oxides from the sol–gel processing of metal complexes
M Epifani, E Melissano, G Pace, M Schioppa
Journal of the european ceramic society 27 (1), 115-123 , 2007
2007
Citations: 97 - Structural and optical properties of silver thin films deposited by RF magnetron sputtering
A Rizzo, MA Tagliente, M Alvisi, S Scaglione
Thin Solid Films 396 (1-2), 29-35 , 2001
2001
Citations: 96 - Synthesis and Characterization of MoO 3 Thin Films and Powders from a Molybdenum Chloromethoxide
M Epifani, P Imperatori, L Mirenghi, M Schioppa, P Siciliano
Chemistry of materials 16 (25), 5495-5501 , 2004
2004
Citations: 76 - Adhesion enhancement of optical coatings on plastic substrate via ion treatment
LV F Sarto, M Alvisi, E Melissano, A Rizzo, S Scaglione
Thin Solid Films 346 (1), 196-201 , 1999
1999
Citations: 46 - A 2D micro-fluxgate earth magnetic field measurement systems with fully automated acquisition setup
A Baschirotto, E Dallago, M Ferri, P Malcovati, A Rossini, G Venchi
Measurement 43 (1), 46-53 , 2010
2010
Citations: 44 - Fluxgate magnetic sensor and front-end circuitry in an integrated microsystem
A Baschirotto, F Borghetti, E Dallago, P Malcovati, M Marchesi, ...
Sensors and Actuators A: Physical 132 (1), 90-97 , 2006
2006
Citations: 36 - An integrated micro-fluxgate magnetic sensor with front-end circuitry
A Baschirotto, E Dallago, P Malcovati, M Marchesi, E Melissano, M Morelli, ...
IEEE Transactions on instrumentation and measurement 58 (9), 3269-3275 , 2009
2009
Citations: 35 - Gold nanoholes fabricated by colloidal lithography: novel insights into nanofabrication, short-range correlation and optical properties
M Cesaria, A Taurino, MG Manera, M Minunni, S Scarano, R Rella
Nanoscale 11 (17), 8416-8432 , 2019
2019
Citations: 22 - Self-assembled metal nanohole arrays with tunable plasmonic properties for SERS single-molecule detection
D Lospinoso, A Colombelli, M Lomascolo, R Rella, MG Manera
Nanomaterials 12 (3), 380 , 2022
2022
Citations: 20 - Fabrication and embedded sensors characterization of a micromachined water-propellant vaporizing liquid microthruster
D Fontanarosa, C De Pascali, MG De Giorgi, P Siciliano, A Ficarella, ...
Applied Thermal Engineering 188, 116625 , 2021
2021
Citations: 18 - Nanoplasmonic biosensing approach for endotoxin detection in pharmaceutical field
A Colombelli, E Primiceri, S Rizzato, AG Monteduro, G Maruccio, R Rella, ...
Chemosensors 9 (1), 10 , 2021
2021
Citations: 16 - Long-and short-range ordered gold nanoholes as large-area optical transducers in sensing applications
M Cesaria, A Colombelli, D Lospinoso, A Taurino, E Melissano, R Rella, ...
Chemosensors 7 (1), 13 , 2019
2019
Citations: 12 - Low temperature sputtering deposition of Al1− xScxN thin films: Physical, chemical, and piezoelectric properties evolution by tuning the nitrogen flux in (Ar+ N2) reactive …
MA Signore, A Serra, D Manno, G Quarta, L Calcagnile, L Maruccio, ...
Journal of Applied Physics 135 (12) , 2024
2024
Citations: 11 - Improvement of the piezoelectric response of AlN thin films through the evaluation of the contact surface potential by piezoresponse force microscopy
MA Signore, L Francioso, C De Pascali, A Serra, D Manno, G Rescio, ...
Vacuum 218, 112596 , 2023
2023
Citations: 11 - An integrated micro-fluxgate magnetic sensor with sputtered ferromagnetic core
A Baschirotto, E Dallago, P Malcovati, M Marchesi, E Melissano, ...
2006 IEEE Instrumentation and Measurement Technology Conference Proceedings … , 2006
2006
Citations: 11 - Shape modulation of plasmonic nanostructures by unconventional lithographic technique
A Colombelli, D Lospinoso, R Rella, MG Manera
Nanomaterials 12 (3), 547 , 2022
2022
Citations: 10 - A CMOS 2D Micro-fluxgate earth magnetic field sensor with digital output
A Baschirotto, E Dallago, V Ferragina, M Ferri, M Grassi, P Malcovati, ...
2007 IEEE International Solid-State Circuits Conference. Digest of Technical … , 2007
2007
Citations: 9 - Synthesis of stoichiometric titania films by oxygen ion assistance of growing titanium
A Rizzo, L Mirenghi, A Quirini, S Scaglione
Surface and Coatings Technology 91 (3), 153-157 , 1997
1997
Citations: 9 - Flow regime characterization of a silicon-based vaporizing liquid microthruster
D Fontanarosa, L Francioso, MG De Giorgi, C De Pascali, A Ficarella, ...
Acta Astronautica 193, 691-703 , 2022
2022
Citations: 8 - Fluxgate magnetic sensor and front-end circuitry in a micro-integrated system
A Baschirotto, F Borghetti, E Dallago, P Malcovati, M Marchesi, ...
EUROSENSORS XIX, 11-14 , 2005
2005
Citations: 8
